Kazumi Wada
Defects in Optoelectronic Materials
Gebonden Engels 2001 1e druk 9789056997144
Verwachte levertijd ongeveer 11 werkdagen
Samenvatting
Defects in Optoelectronic Materials bridges the gap between device process engineers and defect physicists by describing current problems in device processing and current understanding of these defects based on defect physics. The volume covers defects and their behaviors in epitaxial growth, in various processes such as plasma processing, deposition and implantation, and in device degradation. This book also provides graduate students cutting-edge information on devices and materials interaction.
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