, ,

Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: Volume 612

Gebonden Engels 2001 9781558995208
Verwachte levertijd ongeveer 9 werkdagen

Samenvatting

This book highlights important achievements and challenges in advanced interconnects and low-k dielectrics as employed in the microelectronics industry. The replacement of Al alloys with Cu along with the introduction of new barrier materials to protect Cu from chemical attack, and the utilization of new dielectric materials with a lower relative dielectric constant k than SiO2 in multilevel metallization structures of increasing complexity, are the major themes of evolution in this field. Invited reviews illustrate the significant progress that has been achieved as well as the challenges that remain. Contributed papers presented by researchers from different countries demonstrate progress on current topics using a truly multidisciplinary approach.

Specificaties

ISBN13:9781558995208
Taal:Engels
Bindwijze:Gebonden
Aantal pagina's:616

Lezersrecensies

Wees de eerste die een lezersrecensie schrijft!

Managementboek Top 100

Rubrieken

    Personen

      Trefwoorden

        Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: Volume 612